JPH0178167U - - Google Patents

Info

Publication number
JPH0178167U
JPH0178167U JP1987172285U JP17228587U JPH0178167U JP H0178167 U JPH0178167 U JP H0178167U JP 1987172285 U JP1987172285 U JP 1987172285U JP 17228587 U JP17228587 U JP 17228587U JP H0178167 U JPH0178167 U JP H0178167U
Authority
JP
Japan
Prior art keywords
grid
ion beam
ion source
ion
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987172285U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987172285U priority Critical patent/JPH0178167U/ja
Publication of JPH0178167U publication Critical patent/JPH0178167U/ja
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP1987172285U 1987-11-10 1987-11-10 Pending JPH0178167U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987172285U JPH0178167U (en]) 1987-11-10 1987-11-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987172285U JPH0178167U (en]) 1987-11-10 1987-11-10

Publications (1)

Publication Number Publication Date
JPH0178167U true JPH0178167U (en]) 1989-05-25

Family

ID=31464262

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987172285U Pending JPH0178167U (en]) 1987-11-10 1987-11-10

Country Status (1)

Country Link
JP (1) JPH0178167U (en])

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